INTERNAL-STRESS AND YOUNGS MODULUS OF TIC COATINGS

被引:15
作者
KINBARA, A
BABA, S
机构
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D O I
10.1016/0040-6090(83)90297-3
中图分类号
T [工业技术];
学科分类号
08 ;
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页码:359 / 364
页数:6
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[1]   ADHERENCE OF SPUTTERED TITANIUM CARBIDES [J].
BRAINARD, WA ;
WHEELER, DR .
THIN SOLID FILMS, 1979, 63 (02) :363-368
[2]   ACTIVATED REACTIVE EVAPORATION PROCESS FOR HIGH RATE DEPOSITION OF COMPOUNDS [J].
BUNSHAH, RF ;
RAGHURAM, AC .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1972, 9 (06) :1385-&
[3]   EFFECT OF SUBSTRATE-TEMPERATURE CONTROL DURING DEPOSITION ON THE ADHERENCE OF ION-PLATED TITANIUM CARBIDE AND VANADIUM CARBIDE FILMS ON MOLYBDENUM [J].
FUKUTOMI, M ;
FUJITSUKA, M ;
KITAJIMA, M ;
SHIKAMA, T ;
OKADA, M .
THIN SOLID FILMS, 1981, 80 (1-3) :271-277
[4]   ADHESION OF SPUTTER-DEPOSITED CARBIDE FILMS TO STEEL SUBSTRATES [J].
GREENE, JE ;
PESTES, M .
THIN SOLID FILMS, 1976, 37 (03) :373-385
[5]   NATURE OF TRANSITION REGION FORMED BETWEEN DC-BASES RF SPUTTERED TIC FILMS AND STEEL SUBSTRATES [J].
GREENE, JE ;
ZILKO, JL .
SURFACE SCIENCE, 1978, 72 (01) :109-124
[6]   THE SCRATCH TEST ADHESION OF TIC DEPOSITED INDUSTRIALLY BY CHEMICAL VAPOR-DEPOSITION ON STEEL [J].
HAMMER, B ;
PERRY, AJ ;
LAENG, P ;
STEINMANN, PA .
THIN SOLID FILMS, 1982, 96 (01) :45-51
[7]   ANNEALING STUDIES OF TIC AND (TI,V)C STRUCTURES PREPARED BY ACTIVATED REACTIVE EVAPORATION [J].
JACOBSON, BE ;
BUNSHAH, RF ;
NIMMAGADDA, R .
THIN SOLID FILMS, 1979, 63 (02) :357-362
[8]   TRANSMISSION ELECTRON-MICROSCOPY STUDIES OF TIC AND VC-TIC DEPOSITS PREPARED BY ACTIVATED REACTIVE EVAPORATION [J].
JACOBSON, BE ;
BUNSHAH, RF ;
NIMMAGADDA, R .
THIN SOLID FILMS, 1978, 54 (01) :107-118
[9]   FRICTION AND ADHESIVE WEAR OF TITANIUM CARBIDE AND TITANIUM NITRIDE OVERLAY COATINGS [J].
JAMAL, T ;
NIMMAGADDA, R ;
BUNSHAH, RF .
THIN SOLID FILMS, 1980, 73 (02) :245-254
[10]   INTERNAL-STRESS, YOUNGS MODULUS AND ADHESION OF VACUUM-DEPOSITED MGF2 FILMS [J].
KINBARA, A ;
BABA, S ;
MATUDA, N ;
SATO, K .
THIN SOLID FILMS, 1982, 96 (02) :155-159