TITANIUM-OXIDE FILMS PREPARED BY DYNAMIC ION MIXING

被引：4

作者：

SETSUHARA, Y ^{[1
]}

AOKI, H ^{[1
]}

MIYAKE, S ^{[1
]}

CHAYAHARA, A ^{[1
]}

SATOU, M ^{[1
]}

机构：

[1] GOVT IND RES INST,IKEDA,OSAKA 563,JAPAN

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1993年 / 80-1卷

关键词：

D O I：

10.1016/0168-583X(93)90809-K

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

Titanium oxide films were prepared by dynamic ion mixing, where the films were synthesized by depositing tintanium atoms and simultaneously bombarding with oxygen ions (1-20 keV). A compact dynamic mixing system with a bucket-type 2.45-GHz electron-cyclotron-resonance (ECR) ion source and an electron beam evaporation source has been used for the formation of the oxide films. The structural analysis by X-ray diffraction showed that polycrystalline TiO2 films of rutile type were formed and that their crystallization was enhanced with increasing ion energy and increasing oxygen pressure during the film growth. Optical and electrical properties of the prepared films are also presented.

引用

页码：1406 / 1408

页数：3

共 11 条

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