HIGH-PRESSURE THERMAL-OXIDATION OF N-GAAS IN AN ATMOSPHERE OF OXYGEN AND WATER-VAPOR

被引：17

作者：

BASU, N

BHAT, KN

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来源：

JOURNAL OF APPLIED PHYSICS | 1988年 / 63卷 / 11期

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D O I：

10.1063/1.340325

中图分类号：

O59 [应用物理学];

学科分类号：

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页码：5500 / 5506

页数：7

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