AUGER SIGNAL INTENSITY DEPENDENCE ON SURFACE-AREA (ROUGHNESS)

被引:25
作者
WU, OKT
BUTLER, EM
机构
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1982年 / 20卷 / 03期
关键词
D O I
10.1116/1.571332
中图分类号
O59 [应用物理学];
学科分类号
摘要
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页码:453 / 457
页数:5
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共 20 条
[1]   DIRECT OBSERVATION OF SURFACE-PROFILE EFFECTS ON X-RAY-PHOTOELECTRON ANGULAR-DISTRIBUTIONS [J].
BAIRD, RJ ;
FADLEY, CS ;
KAWAMOTO, S ;
MEHTA, M .
CHEMICAL PHYSICS LETTERS, 1975, 34 (01) :49-54
[2]   CONCENTRATION PROFILES FOR IRREGULAR SURFACES FROM X-RAY PHOTOELECTRON ANGULAR-DISTRIBUTIONS [J].
BAIRD, RJ ;
FADLEY, CS ;
KAWAMOTO, SK ;
MEHTA, M ;
ALVAREZ, R ;
SILVA, JA .
ANALYTICAL CHEMISTRY, 1976, 48 (06) :843-846
[3]   Adsorption of gases in multimolecular layers [J].
Brunauer, S ;
Emmett, PH ;
Teller, E .
JOURNAL OF THE AMERICAN CHEMICAL SOCIETY, 1938, 60 :309-319
[4]  
CHANG CC, 1974, CHARACTERIZATION SOL, P509
[5]  
Coburn J. W., 1974, Critical Reviews in Solid State Sciences, V4, P561, DOI 10.1080/10408437308245843
[6]   SPUTTERING IN SURFACE ANALYSIS OF SOLIDS - DISCUSSION OF SOME PROBLEMS [J].
COBURN, JW .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1976, 13 (05) :1037-1044
[7]  
Ebel H., 1973, Journal of Electron Spectroscopy and Related Phenomena, V2, P277, DOI 10.1016/0368-2048(73)80020-9
[8]   SURFACE ANALYSIS AND ANGULAR-DISTRIBUTIONS IN X-RAY PHOTOELECTRON-SPECTROSCOPY [J].
FADLEY, CS ;
BAIRD, RJ ;
SIEKHAUS, W ;
NOVAKOV, T ;
BERGSTROM, SA .
JOURNAL OF ELECTRON SPECTROSCOPY AND RELATED PHENOMENA, 1974, 4 (02) :93-137
[9]   INSTRUMENTATION FOR SURFACE STUDIES - XPS ANGULAR-DISTRIBUTIONS [J].
FADLEY, CS .
JOURNAL OF ELECTRON SPECTROSCOPY AND RELATED PHENOMENA, 1974, 5 (NOV-D) :725-754
[10]   DEPTH RESOLUTION AND SURFACE-ROUGHNESS EFFECTS IN SPUTTER PROFILING OF NICR MULTILAYER SANDWICH SAMPLES USING AUGER-ELECTRON SPECTROSCOPY [J].
HOFMANN, S ;
ERLEWEIN, J ;
ZALAR, A .
THIN SOLID FILMS, 1977, 43 (03) :275-283