共 10 条
[2]
IMPROVEMENTS IN GAAS PLASMA-DEPOSITED SILICON-NITRIDE INTERFACE QUALITY BY PRE-DEPOSITION GAAS SURFACE-TREATMENT AND POST-DEPOSITION ANNEALING
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY,
1982, 21 (02)
:453-456
[5]
TEMPERATURE DEPENDENCE OF INVERSION-LAYER FREQUENCY RESPONSE IN SILICON
[J].
BELL SYSTEM TECHNICAL JOURNAL,
1967, 46 (03)
:513-&
[7]
ELECTRICAL-PROPERTIES OF SIO2 AND SI3N4 DIELECTRIC LAYERS ON INP
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY,
1981, 19 (03)
:373-379
[10]
NATIVE OXIDE FORMATION AND ELECTRICAL INSTABILITIES AT THE INSULATOR/INP INTERFACE
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B,
1983, 1 (03)
:778-781