SIO2/INP INTERFACES WITH REDUCED INTERFACE STATE DENSITY

被引:8
作者
WAGER, JF
CLARK, MD
JULLENS, RA
机构
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1984年 / 2卷 / 03期
关键词
D O I
10.1116/1.582843
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
引用
收藏
页码:584 / 587
页数:4
相关论文
共 10 条
[1]   SURFACE STATES AT STEAM-GROWN SILICON-SILICON DIOXIDE INTERFACES [J].
BERGLUND, CN .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 1966, ED13 (10) :701-+
[2]   IMPROVEMENTS IN GAAS PLASMA-DEPOSITED SILICON-NITRIDE INTERFACE QUALITY BY PRE-DEPOSITION GAAS SURFACE-TREATMENT AND POST-DEPOSITION ANNEALING [J].
CLARK, MD ;
ANDERSON, CL .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1982, 21 (02) :453-456
[3]   INTERPRETATION OF NONEQUILIBRIUM MEASUREMENTS ON MOS DEVICES USING THE LINEAR VOLTAGE RAMP TECHNIQUE [J].
FARAONE, L ;
SIMMONS, JG ;
AGARWALS, AK ;
TONNER, PD .
SOLID-STATE ELECTRONICS, 1981, 24 (08) :709-716
[4]   INP-SIO2 MIS STRUCTURE WITH REDUCED INTERFACE STATE DENSITY NEAR CONDUCTION-BAND [J].
FRITZSCHE, D .
ELECTRONICS LETTERS, 1978, 14 (03) :51-52
[5]   TEMPERATURE DEPENDENCE OF INVERSION-LAYER FREQUENCY RESPONSE IN SILICON [J].
GOETZBER.A ;
NICOLLIA.EH .
BELL SYSTEM TECHNICAL JOURNAL, 1967, 46 (03) :513-&
[6]   EFFECTS OF OXIDE TRAPS ON MOS CAPACITANCE [J].
HEIMAN, FP ;
WARFIELD, G .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 1965, ED12 (04) :167-&
[7]   ELECTRICAL-PROPERTIES OF SIO2 AND SI3N4 DIELECTRIC LAYERS ON INP [J].
MEINERS, LG .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1981, 19 (03) :373-379
[8]   PLASMA-ENHANCED CHEMICAL VAPOR-DEPOSITED SIO2/INP INTERFACE [J].
WAGER, JF ;
WILMSEN, CW .
JOURNAL OF APPLIED PHYSICS, 1982, 53 (08) :5789-5797
[9]   OXIDATION OF INP IN A PLASMA-ENHANCED CHEMICAL VAPOR-DEPOSITION REACTOR [J].
WAGER, JF ;
MAKKY, WH ;
WILMSEN, CW ;
MEINERS, LG .
THIN SOLID FILMS, 1982, 95 (04) :343-350
[10]   NATIVE OXIDE FORMATION AND ELECTRICAL INSTABILITIES AT THE INSULATOR/INP INTERFACE [J].
WAGER, JF ;
GEIB, KM ;
WILMSEN, CW ;
KAZMERSKI, LL .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1983, 1 (03) :778-781