UNIVERSAL ENERGY-DEPENDENCE OF PHYSICAL AND ION-ENHANCED CHEMICAL ETCH YIELDS AT LOW ION ENERGY

被引：255

作者：

STEINBRUCHEL, C ^{[1
]}

机构：

[1] RENSSELAER POLYTECH INST,DEPT MAT ENGN,TROY,NY 12180

来源：

APPLIED PHYSICS LETTERS | 1989年 / 55卷 / 19期

关键词：

D O I：

10.1063/1.102336

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1960 / 1962

页数：3

共 28 条

[1] A UNIVERSAL RELATION FOR THE SPUTTERING YIELD OF MONATOMIC SOLIDS AT NORMAL ION INCIDENCE [J].

BOHDANSKY, J .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1984, 2 (1-3) :587-591

[2]

FLAMM DL, 1984, VLSI ELECTRONICS MIC, P190

[3]

HARPER JME, 1981, J ELECTROCHEM SOC, V128, P1077, DOI 10.1149/1.2127554

[4] SPUTTERING YIELD MEASUREMENTS WITH LOW-ENERGY METAL ION BEAMS [J].

HAYWARD, WH ;

WOLTER, AR .

JOURNAL OF APPLIED PHYSICS, 1969, 40 (07) :2911-&

[5] LOW-ENERGY SELF-SPUTTERING YIELDS OF NICKEL [J].

HECHTL, E ;

BAY, HL ;

BOHDANSKY, J .

APPLIED PHYSICS, 1978, 16 (02) :147-150

[6] ARGON-ION ASSISTED ETCHING OF SILICON BY MOLECULAR CHLORINE [J].

KOLFSCHOTEN, AW ;

HARING, RA ;

HARING, A ;

DEVRIES, AE .

JOURNAL OF APPLIED PHYSICS, 1984, 55 (10) :3813-3818

[7] SPUTTERING YIELDS OF METALS FOR AR+ AND NE+ IONS WITH ENERGIES FROM 50 TO 600 EV [J].

LAEGREID, N ;

WEHNER, GK .

JOURNAL OF APPLIED PHYSICS, 1961, 32 (03) :365-&

[8] A SEMI-EMPIRICAL FORMULA FOR THE ENERGY-DEPENDENCE OF THE SPUTTERING YIELD [J].

MATSUNAMI, N ;

YAMAMURA, Y ;

ITIKAWA, Y ;

ITOH, N ;

KAZUMATA, Y ;

MIYAGAWA, S ;

MORITA, K ;

SHIMIZU, R .

RADIATION EFFECTS LETTERS, 1980, 57 (1-2) :15-21

[9] INVESTIGATION OF PLASMA-ETCHING MECHANISMS USING BEAMS OF REACTIVE GAS IONS [J].

MAYER, TM ;

BARKER, RA ;

WHITMAN, LJ .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1981, 18 (02) :349-352

[10] SURFACE MODIFICATION IN PLASMA-ASSISTED ETCHING OF SILICON [J].

MIZUTANI, T ;

DALE, CJ ;

CHU, WK ;

MAYER, TM .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1985, 7-8 (MAR) :825-830

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