DEPOSITION OF METASTABLE BINARY ALLOY THIN-FILMS USING SEQUENTIAL ION-BEAMS FROM A SINGLE ION-SOURCE

被引：6

作者：

AHN, J

LAWSON, RPW

YOO, KM

STROMSMOE, KA

BRETT, MJ

机构：

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1986年 / 17卷 / 01期

关键词：

D O I：

10.1016/0168-583X(86)90449-0

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：37 / 45

页数：9

共 38 条

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[6]

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