LOCAL-STRUCTURE OF S IMPURITIES IN IMPLANTED GAAS

被引：12

作者：

SETTE, F

PEARTON, SJ

POATE, JM

ROWE, JE

机构：

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1987年 / 19-20卷

关键词：

D O I：

10.1016/S0168-583X(87)80080-0

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：408 / 412

页数：5

共 15 条

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NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1985, 7-8 (MAR) :448-452

[10] ION-IMPLANTATION IN GAAS [J].

PEARTON, SJ ;

POATE, JM ;

SETTE, F ;

GIBSON, JM ;

JACOBSON, DC ;

WILLIAMS, JS .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1987, 19-20 :369-380

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