LOW-TEMPERATURE DIRECT NITRIDATION OF SILICON IN NITROGEN PLASMA GENERATED BY MICROWAVE-DISCHARGE

被引：14

作者：

MOSLEHI, MM

FU, CY

SIGMON, TW

SARASWAT, KC

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1985年 / 58卷 / 06期

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D O I：

10.1063/1.335915

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

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页码：2416 / 2419

页数：4

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