DRY PROCESSING OF HIGH-RESOLUTION AND HIGH ASPECT RATIO STRUCTURES IN GAAS-ALXGA1-XAS FOR INTEGRATED-OPTICS

被引：41

作者：

SOMEKH, S ^{[1
]}

CASEY, HC ^{[1
]}

机构：

[1] BELL TEL LABS INC, MURRAY HILL, NJ 07974 USA

来源：

APPLIED OPTICS | 1977年 / 16卷 / 01期

关键词：

D O I：

10.1364/AO.16.000126

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

引用

页码：126 / 136

页数：11

共 51 条

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