THERMODYNAMIC ANALYSIS ON VAPOR-PHASE EPITAXY OF GAAS BY GACL3 AND ASH3 SYSTEM

被引：6

作者：

KOUKITU, A ^{[1
]}

HASEGAWA, F ^{[1
]}

SEKI, H ^{[1
]}

机构：

[1] UNIV TSUKUBA, INST MAT SCI, TSUKUBA CITY 305, JAPAN

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS | 1988年 / 27卷 / 09期

关键词：

D O I：

10.1143/JJAP.27.L1594

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：L1594 / L1596

页数：3

共 10 条

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