STUDY OF THE ETCH-STOP MECHANISM IN SILICON

[1] DETERMINATION OF PROPERTIES OF FILMS ON SILICON BY METHOD OF ELLIPSOMETRY [J]. JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1962, 52 (09) : 970 - &

[2] ASPNES D, COMMUNICATION

[3] SPECTROSCOPIC ANALYSIS OF THE INTERFACE BETWEEN SI AND ITS THERMALLY GROWN OXIDE [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1980, 127 (06) : 1359 - 1365

[4] OPTICAL-PROPERTIES OF THE INTERFACE BETWEEN SI AND ITS THERMALLY GROWN OXIDE [J]. PHYSICAL REVIEW LETTERS, 1979, 43 (14) : 1046 - 1050

[5] SODIUM-HYDROXIDE SOLUTION SHOWS SELECTIVE ETCHING OF BORON-DOPED SILICON [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1979, 126 (02) : 345 - 346

[6] FABRICATION OF HIGH PRECISION NOZZLES BY ANISOTROPIC ETCHING OF (100) SILICON [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1978, 125 (08) : 1321 - 1327

[7] ANISOTROPIC ETCHING OF SILICON [J]. IEEE TRANSACTIONS ON ELECTRON DEVICES, 1978, 25 (10) : 1185 - 1193

[8] BERGMAN I., 1961, Journal of Applied Chemistry, V11, P369

[9] BOCKRIS JO, 1970, MODERN ELECTROCHEMIS, V2, pCH11

[10] BOGH A, 1971, J ELECTROCHEM SOC, V118, P401

[1] DETERMINATION OF PROPERTIES OF FILMS ON SILICON BY METHOD OF ELLIPSOMETRY [J]. JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1962, 52 (09) : 970 - &

[2] ASPNES D, COMMUNICATION

[3] SPECTROSCOPIC ANALYSIS OF THE INTERFACE BETWEEN SI AND ITS THERMALLY GROWN OXIDE [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1980, 127 (06) : 1359 - 1365

[4] OPTICAL-PROPERTIES OF THE INTERFACE BETWEEN SI AND ITS THERMALLY GROWN OXIDE [J]. PHYSICAL REVIEW LETTERS, 1979, 43 (14) : 1046 - 1050

[5] SODIUM-HYDROXIDE SOLUTION SHOWS SELECTIVE ETCHING OF BORON-DOPED SILICON [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1979, 126 (02) : 345 - 346

[6] FABRICATION OF HIGH PRECISION NOZZLES BY ANISOTROPIC ETCHING OF (100) SILICON [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1978, 125 (08) : 1321 - 1327

[7] ANISOTROPIC ETCHING OF SILICON [J]. IEEE TRANSACTIONS ON ELECTRON DEVICES, 1978, 25 (10) : 1185 - 1193

[8] BERGMAN I., 1961, Journal of Applied Chemistry, V11, P369

[9] BOCKRIS JO, 1970, MODERN ELECTROCHEMIS, V2, pCH11

[10] BOGH A, 1971, J ELECTROCHEM SOC, V118, P401