DIFFUSION OF ION-IMPLANTED ARSENIC IN SILICON

[21] ARSENIC ISOCONCENTRATION DIFFUSION STUDIES IN SILICON [J]. JOURNAL OF APPLIED PHYSICS, 1969, 40 (06) : 2390 - &

[22] ELECTRICAL AND BACKSCATTERING MEASUREMENTS OF ARSENIC IMPLANTED SILICON [J]. APPLIED PHYSICS, 1974, 4 (02): : 115 - 123

[23] SIMPLIFIED EXPRESSION FOR DISTRIBUTION OF DIFFUSED IMPURITY [J]. JAPANESE JOURNAL OF APPLIED PHYSICS, 1971, 10 (01) : 162 - &

[24] DIFFUSION PROFILES OF ARSENIC IN SILICON OBSERVED BY BACKSCATTERING METHOD AND BY ELECTRICAL MEASUREMENT [J]. JAPANESE JOURNAL OF APPLIED PHYSICS, 1974, 13 (02) : 361 - 362

[25] ANODIC OXIDE FILMS FOR DEVICE FABRICATION IN SILICON .1. THE CONTROL LED INCORPORATION OF PHOSPHORUS INTO ANODIC OXIDE FILMS ON SILICON [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1964, 111 (06) : 682 - 688

[26] ARSENIC CLUSTERING IN SILICON [J]. JOURNAL OF APPLIED PHYSICS, 1971, 42 (08) : 3195 - +

[27] SWALIN RA, 1962, THERMODYNAMICS SOLID, P149

[28] TANNEBAUM E, 1962, SOLID STATE ELECTRON, V2, P123

[29] THURMOND CD, 1960, PROPERTIES ELEMENTAL, P121

[30] SOLID SOLUBILITIES OF IMPURITY ELEMENTS IN GERMANIUM AND SILICON [J]. BELL SYSTEM TECHNICAL JOURNAL, 1960, 39 (01): : 205 - 233

[21] ARSENIC ISOCONCENTRATION DIFFUSION STUDIES IN SILICON [J]. JOURNAL OF APPLIED PHYSICS, 1969, 40 (06) : 2390 - &

[22] ELECTRICAL AND BACKSCATTERING MEASUREMENTS OF ARSENIC IMPLANTED SILICON [J]. APPLIED PHYSICS, 1974, 4 (02): : 115 - 123

[23] SIMPLIFIED EXPRESSION FOR DISTRIBUTION OF DIFFUSED IMPURITY [J]. JAPANESE JOURNAL OF APPLIED PHYSICS, 1971, 10 (01) : 162 - &

[24] DIFFUSION PROFILES OF ARSENIC IN SILICON OBSERVED BY BACKSCATTERING METHOD AND BY ELECTRICAL MEASUREMENT [J]. JAPANESE JOURNAL OF APPLIED PHYSICS, 1974, 13 (02) : 361 - 362

[25] ANODIC OXIDE FILMS FOR DEVICE FABRICATION IN SILICON .1. THE CONTROL LED INCORPORATION OF PHOSPHORUS INTO ANODIC OXIDE FILMS ON SILICON [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1964, 111 (06) : 682 - 688

[26] ARSENIC CLUSTERING IN SILICON [J]. JOURNAL OF APPLIED PHYSICS, 1971, 42 (08) : 3195 - +

[27] SWALIN RA, 1962, THERMODYNAMICS SOLID, P149

[28] TANNEBAUM E, 1962, SOLID STATE ELECTRON, V2, P123

[29] THURMOND CD, 1960, PROPERTIES ELEMENTAL, P121

[30] SOLID SOLUBILITIES OF IMPURITY ELEMENTS IN GERMANIUM AND SILICON [J]. BELL SYSTEM TECHNICAL JOURNAL, 1960, 39 (01): : 205 - 233