REDUCTION OF INTERNAL-STRESS BY COMPOSITIONAL GRADIENT LAYER INSERTED BETWEEN TISI2 AND SI

被引：3

作者：

HATA, T

TSUCHITANI, M

KAMIYA, K

HORITA, S

机构：

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS | 1989年 / 28卷 / 12期

关键词：

D O I：

10.1143/JJAP.28.L2297

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

收藏

页码：L2297 / L2300

页数：4

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