THE INFLUENCE OF HIGH-PRESSURE OXIDATION ON BORON REDISTRIBUTION IN LOCOS STRUCTURES

被引：6

作者：

DEROUXDAUPHIN, P ^{[1
]}

GONCHOND, JP ^{[1
]}

机构：

[1] CTR NATL ETUD TELECOMMUN,CTR NORBERT SEGARD,F-38243 MEYLAN,FRANCE

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1984年 / 131卷 / 06期

关键词：

D O I：

10.1149/1.2115862

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

页码：1418 / 1423

页数：6

共 17 条

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