COBALT SILICIDE FORMATION INDUCED BY OXYGEN ION-BOMBARDMENT

被引：3

作者：

EDWARDS, SC ^{[1
]}

COLLINS, RA ^{[1
]}

DEARNALEY, G ^{[1
]}

机构：

[1] UK AERE,HARWELL OX11 0RA,OXON,ENGLAND

来源：

JOURNAL OF PHYSICS D-APPLIED PHYSICS | 1989年 / 22卷 / 09期

关键词：

D O I：

10.1088/0022-3727/22/9/015

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1340 / 1346

页数：7

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