共 27 条
[3]
MONOVACANCY FORMATION ENTHALPY IN SILICON
[J].
PHYSICAL REVIEW LETTERS,
1986, 56 (20)
:2195-2198
[5]
Fair R. B., 1981, Impurity doping processes in silicon, P315
[10]
DOPANT ELECTRICAL-ACTIVITY AND MAJORITY-CARRIER MOBILITY IN B-DELTA-DOPED AND SB-DELTA-DOPED SI THIN-FILMS
[J].
PHYSICAL REVIEW B,
1993, 47 (19)
:12618-12624