EPITAXIAL SILICIDE FORMATION BY MULTI-SHOT IRRADIATION OF NI THIN-FILMS ON SI WITH ND LASER

被引：11

作者：

HARITH, MA

ZHANG, JP

BAERI, P

RIMINI, E

CELOTTI, G

机构：

[1] UNIV CATANIA,IST DIPARTIMENTALE FIS,I-95129 CATANIA,ITALY

[2] CNR,LAMEL,I-40100 BOLOGNA,ITALY

来源：

JOURNAL OF APPLIED PHYSICS | 1985年 / 57卷 / 10期

关键词：

D O I：

10.1063/1.335360

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

收藏

页码：4560 / 4565

页数：6

相关论文

共 15 条

[1] BAERI P, 1983, J PHYS PARIS C, V5, P449
[2] TITANIUM AND NICKEL SILICIDE FORMATION AFTER Q-SWITCHED LASER AND MULTI-SCANNING ELECTRON-BEAM IRRADIATION
BENTINI, GG
SERVIDORI, M
COHEN, C
NIPOTI, R
DRIGO, AV
[J]. JOURNAL OF APPLIED PHYSICS, 1982, 53 (03) : 1525 - 1531
[3] EPITAXIAL NISI2 FORMATION BY PULSED ION-BEAM ANNEALING
CHEN, LJ
HUNG, LS
MAYER, JW
BAGLIN, JEE
NERI, JM
HAMMER, DA
[J]. APPLIED PHYSICS LETTERS, 1982, 40 (07) : 595 - 597
[4] FOLL F, 1981, J APPL PHYS, V52, P250, DOI 10.1063/1.328440
[5] EPITAXIAL NISI2 FORMATION BY PULSED LASER IRRADIATION OF THIN NI LAYERS DEPOSITED ON SI SUBSTRATES
GRIMALDI, MG
BAERI, P
RIMINI, E
CELOTTI, G
[J]. APPLIED PHYSICS LETTERS, 1983, 43 (03) : 244 - 246
[6] THERMAL AND ION-INDUCED DISSOCIATION OF NISI AND NISI2 IN CONTACT WITH NICKEL
HUNG, LS
MAYER, JW
[J]. THIN SOLID FILMS, 1983, 109 (01) : 85 - 92
[7] ELECTRON-BEAM INDUCED REACTIONS IN METAL SI SYSTEMS
MAJNI, G
NAVA, F
OTTAVIANI, G
LUCHES, A
NASSISI, V
CELOTTI, G
[J]. VACUUM, 1982, 32 (01) : 11 - 18
[8] MAYER JW, 1983, SURFACE MODIFICATION, pCH9
[9] NISI FORMATION AT THE SILICIDE/SI INTERFACE ON THE NIPT/SI SYSTEM
OTTAVIANI, G
TU, KN
CHU, WK
HUNG, LS
MAYER, JW
[J]. JOURNAL OF APPLIED PHYSICS, 1982, 53 (07) : 4903 - 4906
[10] LASER-INDUCED REACTIONS OF PLATINUM AND OTHER METAL-FILMS WITH SILICON
POATE, JM
LEAMY, HJ
SHENG, TT
CELLER, GK
[J]. APPLIED PHYSICS LETTERS, 1978, 33 (11) : 918 - 920