THIN-FILM COMPOUND PHASE-FORMATION SEQUENCE - AN EFFECTIVE HEAT OF FORMATION MODEL

被引:225
作者
PRETORIUS, R
MARAIS, TK
THERON, CC
机构
[1] Ion-Solid Interaction Division, Van de Graaff Group, National Accelerator Centre, Faure
关键词
D O I
10.1016/0920-2307(93)90003-W
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
An effective heat of formation (EHF) model for predicting compound phase formation sequence is described. The EHF model defines an effective heat of formation DELTAH', which is concentration-dependent. By choosing the effective concentration of the interacting species at the growth interface to be that of the liquidus minimum, the model correctly predicts first phase formation during formation of silicides, germanides, aluminides and other metal-metal binary systems. The ability to predict phase formation sequence and phase decomposition is illustrated for some silicide and aluminide systems. The EHF model is also used to describe phase formation in lateral and bulk diffusion couples and for the interpretation of the effects of impurities and diffusion barriers on phase formation. It is also shown how the EHF model can be applied to laser and ion-beam induced phase formation and to the formation of amorphous and metastable phases. A compilation of recommended heats of formation for many silicide, germanide, aluminide and other metal-metal binary systems is given. In cases where experimental heats of formation were not available or if they were suspected of being unreliable, use was made of calculated values according to Miedema's model.
引用
收藏
页码:1 / 83
页数:83
相关论文
共 246 条
  • [71] FERRO R, 1963, ATTI ACCAD NAZ SFMNR, V34, P359
  • [72] PHASE FORMATION AND DIFFUSION IN V/AL THIN-FILM COUPLES PREPARED UNDER VARYING DEPOSITION CONDITIONS
    FINSTAD, TG
    SALOMONSEN, G
    NORMAN, N
    JOHANNESSEN, JS
    [J]. THIN SOLID FILMS, 1984, 114 (03) : 271 - 284
  • [73] CHARACTERIZATION OF EVAPORATED GOLD-INDIUM FILMS ON SEMICONDUCTORS
    FINSTAD, TG
    ANDREASSEN, T
    OLSEN, T
    [J]. THIN SOLID FILMS, 1975, 29 (01) : 145 - 154
  • [74] A STUDY OF MIXING BEHAVIOR OF AL-AG, AL-IN AND AL-SN SYSTEMS BY AR ION IRRADIATION
    FUJINO, Y
    YAMAGUCHI, S
    NARAMOTO, H
    OZAWA, K
    [J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH, 1983, 218 (1-3): : 691 - 695
  • [75] GAGE PR, 1965, T METALL SOC AIME, V233, P832
  • [76] INVESTIGATION OF DIFFUSION IN CU-AL THIN-FILM SYSTEM
    GERSHINSKII, AE
    FOMIN, BI
    CHEREPOV, EI
    EDELMAN, FL
    [J]. THIN SOLID FILMS, 1977, 42 (03) : 269 - 275
  • [77] GROWTH-KINETICS OF PLANAR BINARY DIFFUSION COUPLES - THIN-FILM CASE VERSUS BULK CASES
    GOSELE, U
    TU, KN
    [J]. JOURNAL OF APPLIED PHYSICS, 1982, 53 (04) : 3252 - 3260
  • [78] GOSELE U, 1989, J APPL PHYS, V66, P2619, DOI 10.1063/1.344229
  • [79] GERMANIDE FORMATION BY THERMAL-TREATMENT OF PLATINUM FILMS DEPOSITED ON SINGLE-CRYSTAL GE[100] SUBSTRATES
    GRIMALDI, MG
    WIELUNSKI, L
    NICOLET, MA
    TU, KN
    [J]. THIN SOLID FILMS, 1981, 81 (03) : 207 - 211
  • [80] FORMATION AND PROPERTIES OF TISI2 FILMS
    GULDAN, A
    SCHILLER, V
    STEFFEN, A
    BALK, P
    [J]. THIN SOLID FILMS, 1983, 100 (01) : 1 - 7