DECONVOLUTION METHODS APPLIED TO SPUTTER DEPTH PROFILES AT INTERFACES

被引：9

作者：

PALACIO, C ^{[1
]}

MARTINEZDUART, JM ^{[1
]}

机构：

[1] UNIV AUTONOMA MADRID,CSIC,INST ESTADO SOLIDO,MADRID 34,SPAIN

来源：

THIN SOLID FILMS | 1983年 / 105卷 / 01期

关键词：

D O I：

10.1016/0040-6090(83)90327-9

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

收藏

页码：25 / 32

页数：8

相关论文

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