EFFECT OF HYDROGEN DILUTION OF SILANE IN HYDROGENATED AMORPHOUS-SILICON FILMS PREPARED BY PHOTOCHEMICAL VAPOR-DEPOSITION

被引：9

作者：

KAMIMURA, T

HIROSE, M

机构：

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1986年 / 25卷 / 12期

关键词：

D O I：

10.1143/JJAP.25.1778

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1778 / 1782

页数：5

共 12 条

[1] PHOTOCHEMICAL VAPOR-DEPOSITION OF UNDOPED AND N-TYPE AMORPHOUS-SILICON FILMS PRODUCED FROM DISILANE
INOUE, T
KONAGAI, M
TAKAHASHI, K
[J]. APPLIED PHYSICS LETTERS, 1983, 43 (08) : 774 - 776
[2] REACTIONS OF ATOMIC-HYDROGEN IN THE DEPOSITION OF HYDROGENATED AMORPHOUS-SILICON BY GLOW-DISCHARGE AND REACTIVE SPUTTERING
KAMPAS, FJ
[J]. JOURNAL OF APPLIED PHYSICS, 1982, 53 (09) : 6408 - 6412
[3] FORMATION KINETICS AND CONTROL OF MICROCRYSTALLITE IN MU-C-SI-H FROM GLOW-DISCHARGE PLASMA
MATSUDA, A
[J]. JOURNAL OF NON-CRYSTALLINE SOLIDS, 1983, 59-6 (DEC) : 767 - 774
[4] PLASMA SPECTROSCOPY GLOW-DISCHARGE DEPOSITION OF HYDROGENATED AMORPHOUS-SILICON
MATSUDA, A
TANAKA, K
[J]. THIN SOLID FILMS, 1982, 92 (1-2) : 171 - 187
[5] SUBSTITUTIONAL DOPING OF PHOTOCHEMICALLY-DEPOSITED AMORPHOUS HYDROGENATED SILICON
MISHIMA, Y
HIROSE, M
OSAKA, Y
ASHIDA, Y
[J]. JOURNAL OF APPLIED PHYSICS, 1984, 56 (10) : 2803 - 2805
[6] MISHIMA Y, 1982, PHILOS MAG B, V46, P1, DOI 10.1080/01418618208236202
[7] EFFECTS OF GROWTH-RATE ON THE MICROCRYSTALLINE CHARACTERISTICS OF PLASMA-DEPOSITED MU-C-SI-H
MIYAZAKI, S
OSAKA, Y
HIROSE, M
[J]. SOLAR ENERGY MATERIALS, 1984, 11 (1-2): : 85 - 95
[8] HIGHLY CONDUCTIVE AND WIDE BAND-GAP AMORPHOUS-MICROCRYSTALLINE MIXED-PHASE SILICON FILMS PREPARED BY PHOTOCHEMICAL VAPOR-DEPOSITION
NISHIDA, S
TASAKI, H
KONAGAI, M
TAKAHASHI, K
[J]. JOURNAL OF APPLIED PHYSICS, 1985, 58 (04) : 1427 - 1431
[9] SAITOH T, 1982, JPN J APPL PHYS S221, V22, P617
[10] EFFECT OF HYDROGEN DILUTION OF SILANE ON OPTOELECTRONIC PROPERTIES IN GLOW-DISCHARGED HYDROGENATED SILICON FILMS
SHIRAFUJI, J
NAGATA, S
KUWAGAKI, M
[J]. JOURNAL OF APPLIED PHYSICS, 1985, 58 (09) : 3661 - 3663

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