CROSSLINKING REACTIONS IN NEGATIVE ELECTRON RESISTS COMPOSED OF HALOGENATED AROMATIC POLYMERS

被引：10

作者：

IMAMURA, S

TAMAMURA, T

SUKEGAWA, K

KOGURE, O

SUGAWARA, S

机构：

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1984年 / 131卷 / 05期

关键词：

D O I：

10.1149/1.2115763

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

页码：1122 / 1129

页数：8

共 22 条

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