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SIMS STUDIES OF BE-9 IMPLANTS IN SEMI-INSULATING INP

被引：26
作者：
OBERSTAR, JD
STREETMAN, BG
BAKER, JE
WILLIAMS, P
机构：
[1] UNIV ILLINOIS,COORDINATED SCI LAB,URBANA,IL 61801
[2] UNIV ILLINOIS,MAT RES LAB,URBANA,IL 61801
来源：
JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1982年 / 129卷 / 06期
关键词：
D O I：
10.1149/1.2124127
中图分类号：
O646 [电化学、电解、磁化学];
学科分类号：
081704 ;
摘要：
引用
收藏
页码：1312 / 1320
页数：9
相关论文
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