ELIMINATION OF PARASITIC BIPOLAR-INDUCED BREAKDOWN EFFECTS IN ULTRA-THIN SOI MOSFETS USING NARROW-BANDGAP-SOURCE (NBS) STRUCTURE

被引:11
作者
SIM, JH
CHOI, CH
KIM, K
机构
[1] Memory Division, Samsung Electronics Corporation, Kyungki-Do
关键词
D O I
10.1109/16.398664
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
In this paper, we introduce the Si/SiGe narrow-bandgap-source (NBS) SOI device structure in order to improve the low drain-to-source breakdown voltage (V-BD) in ultra-thin SOI devices. Reducing the potential barrier of valence band between source and body by applying the SiGe layer at the source region, we can improve the drain-to-source breakdown voltage by suppressing the hole accumulation in the body. As comfirmed by 2D simulation results, NBS-SOI devices provide excellent performance compared to conventional SOI devices.
引用
收藏
页码:1495 / 1502
页数:8
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