X-RAY-DIFFRACTION STUDY OF TIN COATINGS SPUTTERED AT DIFFERENT SUBSTRATE TEMPERATURES

被引：6

作者：

VALVODA, V ^{[1
]}

KUZEL, R ^{[1
]}

CERNY, R ^{[1
]}

DOBIASOVA, L ^{[1
]}

MUSIL, J ^{[1
]}

POULEK, V ^{[1
]}

机构：

[1] CZECHOSLOVAK ACAD SCI, INST PHYS, CS-11142 PRAGUE 1, CZECHOSLOVAKIA

来源：

CRYSTAL RESEARCH AND TECHNOLOGY | 1988年 / 23卷 / 12期

关键词：

D O I：

10.1002/crat.2170231214

中图分类号：

O7 [晶体学];

学科分类号：

0702 ; 070205 ; 0703 ; 080501 ;

摘要：

引用

页码：1483 / 1492

页数：10

共 19 条

[1]

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[2]

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[5]

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[8] STABILITY OF NITROGEN-RICH TITANIUM NITRIDE AND ZIRCONIUM NITRIDE FILMS [J].

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[9] MICROSTRUCTURAL AND MICROCHEMICAL CHARACTERIZATION OF HARD COATINGS [J].

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[10] STRUCTURE AND PROPERTIES OF TIN COATINGS [J].

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THIN SOLID FILMS, 1985, 128 (1-2) :21-44

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