THIN-FILM FIELD-EFFECT TRANSISTORS INCORPORATING HYDROGENATED AMORPHOUS-SILICON PRODUCED BY RF MAGNETRON SPUTTERING

被引:5
作者
ABDULRIDA, MC
ALLISON, J
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D O I
10.1016/0040-6090(83)90056-1
中图分类号
T [工业技术];
学科分类号
08 ;
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页码:L43 / L46
页数:4
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