HIGH-TEMPERATURE OXYGEN IMPLANTATION IN SILICON - SOI STRUCTURE FORMATION CHARACTERISTICS

被引：21

作者：

MAILLET, S ^{[1
]}

STUCK, R ^{[1
]}

GROB, JJ ^{[1
]}

GOLANSKI, A ^{[1
]}

PANTEL, R ^{[1
]}

PERIO, A ^{[1
]}

机构：

[1] CTR NATL ETUDES TELECOMMUN, F-38243 MEYLAN, FRANCE

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1987年 / 19-20卷

关键词：

D O I：

10.1016/S0168-583X(87)80060-5

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：294 / 298

页数：5

共 18 条

[1] EARLY STAGES OF OXYGEN SEGREGATION AND PRECIPITATION IN SILICON [J].

BOURRET, A ;

THIBAULTDESSEAUX, J ;

SEIDMAN, DN .

JOURNAL OF APPLIED PHYSICS, 1984, 55 (04) :825-836

[2] INFLUENCE OF OXYGEN ON SILICON RESISTIVITY [J].

CAZCARRA, V ;

ZUNINO, P .

JOURNAL OF APPLIED PHYSICS, 1980, 51 (08) :4206-4211

[3] HIGH-QUALITY SI-ON-SIO2 FILMS BY LARGE DOSE OXYGEN IMPLANTATION AND LAMP ANNEALING [J].

CELLER, GK ;

HEMMENT, PLF ;

WEST, KW ;

GIBSON, JM .

APPLIED PHYSICS LETTERS, 1986, 48 (08) :532-534

[4] OXYGEN DISTRIBUTIONS IN SYNTHESIZED SIO2 LAYERS FORMED BY HIGH-DOSE O+ IMPLANTATION INTO SILICON [J].

HEMMENT, PLF ;

MAYDELLONDRUSZ, E ;

STEVENS, KG ;

KILNER, JA ;

BUTCHER, J .

VACUUM, 1984, 34 (1-2) :203-208

[5] GROWTH LAW FOR DISK PRECIPITATES, AND OXYGEN PRECIPITATION IN SILICON [J].

HU, SM .

APPLIED PHYSICS LETTERS, 1986, 48 (02) :115-117

[6]

ITOH Y, 1985, JPN J APPL PHYS, V23, P279

[7]

IZUMI K, 1984, MATER RES SOC S P, V23, P443

[8] MICROSTRUCTURE OF SILICON IMPLANTED WITH HIGH-DOSE OXYGEN IONS [J].

JAUSSAUD, C ;

STOEMENOS, J ;

MARGAIL, J ;

DUPUY, M ;

BLANCHARD, B ;

BRUEL, M .

APPLIED PHYSICS LETTERS, 1985, 46 (11) :1064-1066

[9] SIMS ANALYSIS OF SILICON INSULATOR STRUCTURES FORMED BY HIGH-DOSE O+ IMPLANTATION INTO SILICON [J].

KILNER, JA ;

LITTLEWOOD, SD ;

HEMMENT, PLF ;

MAYDELLONDRUSZ, E ;

STEPHENS, KG .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH, 1983, 218 (1-3) :573-578

[10] SECONDARY ION QUADRUPOLE MASS-SPECTROMETER FOR DEPTH PROFILING-DESIGN AND PERFORMANCE EVALUATION [J].

MAGEE, CW ;

HARRINGTON, WL ;

HONIG, RE .

REVIEW OF SCIENTIFIC INSTRUMENTS, 1978, 49 (04) :477-485

← 1 2 →