TRANSIENT ANNEALING OF SEMICONDUCTORS BY LASER, ELECTRON-BEAM AND RADIANT HEATING TECHNIQUES

被引:48
作者
CULLIS, AG
机构
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D O I
10.1088/0034-4885/48/8/002
中图分类号
O4 [物理学];
学科分类号
0702 ;
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页码:1155 / 1233
页数:79
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