REDISTRIBUTION OF AS DURING PD2SI FORMATION - ION CHANNELING MEASUREMENTS

被引：36

作者：

WITTMER, M ^{[1
]}

TING, CY ^{[1
]}

OHDOMARI, I ^{[1
]}

TU, KN ^{[1
]}

机构：

[1] IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598

来源：

JOURNAL OF APPLIED PHYSICS | 1982年 / 53卷 / 10期

关键词：

D O I：

10.1063/1.330066

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：6781 / 6787

页数：7

共 19 条

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APPLIED PHYSICS LETTERS, 1981, 38 (12) :1015-1017

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