STRUCTURAL CHARACTERIZATION OF TIN DOPED INDIUM OXIDE-FILMS PREPARED BY MAGNETRON SPUTTERING

被引:10
作者
BANERJEE, R [1 ]
RAY, S [1 ]
BATABYAL, AK [1 ]
BARUA, AK [1 ]
SEN, S [1 ]
机构
[1] CENT GLASS & CERAM RES INST, CALCUTTA 700032, W BENGAL, INDIA
关键词
D O I
10.1007/BF00553058
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
引用
收藏
页码:2937 / 2944
页数:8
相关论文
共 15 条
[1]   TRANSPARENT CONDUCTORS - A STATUS REVIEW [J].
CHOPRA, KL ;
MAJOR, S ;
PANDYA, DK .
THIN SOLID FILMS, 1983, 102 (01) :1-46
[2]   PROPERTIES OF SN-DOPED IN2O3 FILMS PREPARED BY RF SPUTTERING [J].
FAN, JCC ;
BACHNER, FJ .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1975, 122 (12) :1719-1725
[3]   HIGHLY CONDUCTIVE, TRANSPARENT FILMS OF SPUTTERED IN2-XSNXO3-Y [J].
FRASER, DB ;
COOK, HD .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1972, 119 (10) :1368-&
[4]   TIN-DOPED IN2O3 FILMS DEPOSITED BY RF-SPUTTERING [J].
FUJINAKA, M ;
BEREZIN, AA .
THIN SOLID FILMS, 1983, 101 (01) :7-10
[5]   STUDY OF FILMS HAVING BASE OF TIN OXIDE AND INDIUM OXIDE BY MEANS OF X-RAY-DIFFRACTION [J].
HECQ, M ;
DUBOIS, A ;
VANCAKEN.J .
THIN SOLID FILMS, 1973, 18 (01) :117-125
[7]   ELECTRICAL, OPTICAL AND STRUCTURAL-PROPERTIES OF THIN-FILMS OF IN2O3-SN DEPOSITED BY HYDROLYSIS [J].
KULASZEWICZ, S .
THIN SOLID FILMS, 1981, 76 (01) :89-95
[8]   PREPARATION AND PROPERTIES OF REACTIVELY CO-SPUTTERED TRANSPARENT CONDUCTING FILMS [J].
LEHMANN, HW ;
WIDMER, R .
THIN SOLID FILMS, 1975, 27 (02) :359-368
[9]   STRUCTURAL CHARACTERIZATION OF TRANSPARENT SEMICONDUCTING THIN-FILMS OF SNO2 AND IN2O3 [J].
MAMMANA, AP ;
BRAGA, ES ;
TORRIANI, I ;
ANDERSON, RL .
THIN SOLID FILMS, 1981, 85 (3-4) :355-359
[10]   PREPARATION OF IN2O3 AND TIN-DOPED IN2O3 FILMS BY A NOVEL ACTIVATED REACTIVE EVAPORATION TECHNIQUE [J].
NATH, P ;
BUNSHAH, RF .
THIN SOLID FILMS, 1980, 69 (01) :63-68