X-RAY TRIPLE-CRYSTAL DIFFRACTOMETER INVESTIGATION OF ARSENIC IMPLANTED SILICON AFTER PULSED LASER IRRADIATION

被引：5

作者：

ZAUMSEIL, P ^{[1
]}

WINTER, U ^{[1
]}

GALLER, R ^{[1
]}

机构：

[1] FRIEDRICH SCHILLER UNIV,SEKT PHYS,DDR-6900 JENA,GER DEM REP

来源：

CRYSTAL RESEARCH AND TECHNOLOGY | 1984年 / 19卷 / 05期

关键词：

D O I：

10.1002/crat.2170190511

中图分类号：

O7 [晶体学];

学科分类号：

0702 ; 070205 ; 0703 ; 080501 ;

摘要：

引用

页码：633 / 641

页数：9

共 15 条

[1] 2-STAGE LASER ANNEALING OF LATTICE DISORDER IN PHOSPHORUS IMPLANTED SILICON [J].

BATTAGLIN, G ;

DELLAMEA, G ;

DRIGO, AV ;

FOTI, G ;

BENTINI, GG ;

SERVIDORI, M .

PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1978, 49 (01) :347-352

[2] X-RAY AND ELECTRON-MICROSCOPY STUDIES OF ARSENIUM IMPLANTED SILICON-CRYSTALS AFTER A PULSED LASER ANNEALING [J].

BRYZA, B ;

AULEYTNER, J ;

BARTSCH, H ;

WIETESKA, K .

CRYSTAL RESEARCH AND TECHNOLOGY, 1983, 18 (02) :173-177

[3] DIFFUSE SCATTERING FROM DEFECT CLUSTERS NEAR BRAGG REFLECTIONS [J].

DEDERICHS, PH .

PHYSICAL REVIEW B-SOLID STATE, 1971, 4 (04) :1041-+

[4] X-RAY ROCKING CURVES ON INHOMOGENEOUS SURFACE-LAYERS ON SI SINGLE-CRYSTALS .2. IMPLANTED LAYERS [J].

HOLY, V ;

KUBENA, J .

CZECHOSLOVAK JOURNAL OF PHYSICS, 1982, 32 (07) :750-766

[5] SEPARATE MEASUREMENTS OF DYNAMICAL AND KINEMATICAL X-RAY DIFFRACTIONS FROM SILICON-CRYSTALS WITH A TRIPLE CRYSTAL DIFFRACTOMETER [J].

IIDA, A ;

KOHRA, K .

PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1979, 51 (02) :533-542

[6]

James R. W., 1950, OPTICAL PRINCIPLES D

[7] DISORDER PRODUCTION IN ION-IMPLANTED SILICON [J].

KERKOW, H ;

LUKASCH, B ;

PIPPIG, R .

PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1982, 70 (02) :489-495

[8] STRAIN PROFILES IN ION-DOPED SILICON OBTAINED FROM X-RAY ROCKING CURVES [J].

KYUTT, RN ;

PETRASHEN, PV ;

SOROKIN, LM .

PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1980, 60 (02) :381-389

[9] X-RAY STUDY OF LATTICE STRAIN IN BORON IMPLANTED LASER ANNEALED SILICON [J].

LARSON, BC ;

BARHORST, JF .

JOURNAL OF APPLIED PHYSICS, 1980, 51 (06) :3181-3185

[10] CONTRAST ASYMMETRIES IN LANG TOPOGRAPHS OF CRYSTALS STRAINED BY THIN FILMS [J].

MEIERAN, ES ;

BLECH, IA .

PHYSICA STATUS SOLIDI, 1968, 29 (02) :653-&

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