IMPROVED MEASUREMENT METHOD IN ROTATING-ANALYZER ELLIPSOMETRY

被引：16

作者：

KAWABATA, S

机构：

来源：

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA A-OPTICS IMAGE SCIENCE AND VISION | 1984年 / 1卷 / 07期

关键词：

D O I：

10.1364/JOSAA.1.000706

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

引用

页码：706 / 710

页数：5

共 10 条

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[5]

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[9]

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[10] MEASUREMEMT OF THICKNESS AND REFRACTIVE INDEX OF VERY THIN FILMS AND OPTICAL PROPERTIES OF SURFACES BY ELLIPSOMETRY [J].

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