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LPE GROWTH ON STRUCTURED [100] INP SUBSTRATES AND THEIR FABRICATION BY PREFERENTIAL ETCHING
被引:30
作者
:
TURLEY, SEH
论文数:
0
引用数:
0
h-index:
0
TURLEY, SEH
GREENE, PD
论文数:
0
引用数:
0
h-index:
0
GREENE, PD
机构
:
来源
:
JOURNAL OF CRYSTAL GROWTH
|
1982年
/ 58卷
/ 02期
关键词
:
D O I
:
10.1016/0022-0248(82)90289-5
中图分类号
:
O7 [晶体学];
学科分类号
:
0702 ;
070205 ;
0703 ;
080501 ;
摘要
:
引用
收藏
页码:409 / 416
页数:8
相关论文
共 22 条
[11]
SELECTIVE ETCHING OF GALLIUM ARSENIDE CRYSTALS IN H2SO4-H2O2-H2O SYSTEM
LIDA, S
论文数:
0
引用数:
0
h-index:
0
LIDA, S
[J].
JOURNAL OF THE ELECTROCHEMICAL SOCIETY,
1971,
118
(05)
: 768
-
&
[12]
INGAASP-INP BURIED CRESCENT LASER EMITTING AT 1-3 MU-M WITH VERY LOW THRESHOLD CURRENT
MUROTANI, T
论文数:
0
引用数:
0
h-index:
0
MUROTANI, T
OOMURA, E
论文数:
0
引用数:
0
h-index:
0
OOMURA, E
HIGUCHI, H
论文数:
0
引用数:
0
h-index:
0
HIGUCHI, H
NAMIZAKI, H
论文数:
0
引用数:
0
h-index:
0
NAMIZAKI, H
SUSAKI, W
论文数:
0
引用数:
0
h-index:
0
SUSAKI, W
[J].
ELECTRONICS LETTERS,
1980,
16
(14)
: 566
-
568
[13]
VAPOR-PHASE GROWTH OF (INDIUM,GA)(ARSENIC,P) QUATERNARY ALLOYS
OLSEN, GH
论文数:
0
引用数:
0
h-index:
0
OLSEN, GH
ZAMEROWSKI, TJ
论文数:
0
引用数:
0
h-index:
0
ZAMEROWSKI, TJ
[J].
IEEE JOURNAL OF QUANTUM ELECTRONICS,
1981,
17
(02)
: 128
-
138
[14]
PREFERENTIAL ETCHING OF GAAS THROUGH PHOTORESIST MASKS
OTSUBO, M
论文数:
0
引用数:
0
h-index:
0
机构:
MITSUBISHI ELECT CORP, CENT RES LAB, ITAMI, HYOGO, JAPAN
MITSUBISHI ELECT CORP, CENT RES LAB, ITAMI, HYOGO, JAPAN
OTSUBO, M
ODA, T
论文数:
0
引用数:
0
h-index:
0
机构:
MITSUBISHI ELECT CORP, CENT RES LAB, ITAMI, HYOGO, JAPAN
MITSUBISHI ELECT CORP, CENT RES LAB, ITAMI, HYOGO, JAPAN
ODA, T
KUMABE, H
论文数:
0
引用数:
0
h-index:
0
机构:
MITSUBISHI ELECT CORP, CENT RES LAB, ITAMI, HYOGO, JAPAN
MITSUBISHI ELECT CORP, CENT RES LAB, ITAMI, HYOGO, JAPAN
KUMABE, H
MIKI, H
论文数:
0
引用数:
0
h-index:
0
机构:
MITSUBISHI ELECT CORP, CENT RES LAB, ITAMI, HYOGO, JAPAN
MITSUBISHI ELECT CORP, CENT RES LAB, ITAMI, HYOGO, JAPAN
MIKI, H
[J].
JOURNAL OF THE ELECTROCHEMICAL SOCIETY,
1976,
123
(05)
: 676
-
680
[15]
MATERIAL-SELECTIVE CHEMICAL ETCHING IN THE SYSTEM INGAASP-INP
PHATAK, SB
论文数:
0
引用数:
0
h-index:
0
机构:
Research Triangle Institute, North Carolina 27709, Research Triangle Park
PHATAK, SB
KELNER, G
论文数:
0
引用数:
0
h-index:
0
机构:
Research Triangle Institute, North Carolina 27709, Research Triangle Park
KELNER, G
[J].
JOURNAL OF THE ELECTROCHEMICAL SOCIETY,
1979,
126
(02)
: 287
-
292
[16]
ENHANCE GAAS ETCH RATES NEAR EDGES OF A PROTECTIVE MASK
SHAW, DW
论文数:
0
引用数:
0
h-index:
0
SHAW, DW
[J].
JOURNAL OF THE ELECTROCHEMICAL SOCIETY,
1966,
113
(09)
: 958
-
&
[17]
FUNDAMENTAL TRANSVERSE AND LONGITUDINAL MODE OSCILLATION IN TERRACED SUBSTRATE GAAS-(GAAL)AS LASERS
SUGINO, T
论文数:
0
引用数:
0
h-index:
0
机构:
Research Laboratory, Matsushita Electronics Corporation, Takatsuki, Osaka
SUGINO, T
ITOH, K
论文数:
0
引用数:
0
h-index:
0
机构:
Research Laboratory, Matsushita Electronics Corporation, Takatsuki, Osaka
ITOH, K
WADA, M
论文数:
0
引用数:
0
h-index:
0
机构:
Research Laboratory, Matsushita Electronics Corporation, Takatsuki, Osaka
WADA, M
SHIMIZU, H
论文数:
0
引用数:
0
h-index:
0
机构:
Research Laboratory, Matsushita Electronics Corporation, Takatsuki, Osaka
SHIMIZU, H
TERAMOTO, I
论文数:
0
引用数:
0
h-index:
0
机构:
Research Laboratory, Matsushita Electronics Corporation, Takatsuki, Osaka
TERAMOTO, I
[J].
IEEE JOURNAL OF QUANTUM ELECTRONICS,
1979,
15
(08)
: 714
-
718
[18]
PREFERENTIAL ETCHING AND ETCHED PROFILE OF GAAS
TARUI, Y
论文数:
0
引用数:
0
h-index:
0
TARUI, Y
KOMIYA, Y
论文数:
0
引用数:
0
h-index:
0
KOMIYA, Y
HARADA, Y
论文数:
0
引用数:
0
h-index:
0
HARADA, Y
[J].
JOURNAL OF THE ELECTROCHEMICAL SOCIETY,
1971,
118
(01)
: 118
-
&
[19]
CHEMICAL ETCHING OF [111] AND [100] SURFACES OF INP
TUCK, B
论文数:
0
引用数:
0
h-index:
0
机构:
UNIV NOTTINGHAM,DEPT ELECT & ELECT ENGN,NOTTINGHAM,ENGLAND
UNIV NOTTINGHAM,DEPT ELECT & ELECT ENGN,NOTTINGHAM,ENGLAND
TUCK, B
BAKER, AJ
论文数:
0
引用数:
0
h-index:
0
机构:
UNIV NOTTINGHAM,DEPT ELECT & ELECT ENGN,NOTTINGHAM,ENGLAND
UNIV NOTTINGHAM,DEPT ELECT & ELECT ENGN,NOTTINGHAM,ENGLAND
BAKER, AJ
[J].
JOURNAL OF MATERIALS SCIENCE,
1973,
8
(11)
: 1559
-
1566
[20]
PROPERTIES OF INVERTED RIB-WAVEGUIDE LASERS OPERATING AT 1.3 MU-M WAVELENGTH
TURLEY, SEH
论文数:
0
引用数:
0
h-index:
0
TURLEY, SEH
HENSHALL, GD
论文数:
0
引用数:
0
h-index:
0
HENSHALL, GD
GREENE, PD
论文数:
0
引用数:
0
h-index:
0
GREENE, PD
KNIGHT, VP
论文数:
0
引用数:
0
h-index:
0
KNIGHT, VP
MOULE, DM
论文数:
0
引用数:
0
h-index:
0
MOULE, DM
WHEELER, SA
论文数:
0
引用数:
0
h-index:
0
WHEELER, SA
[J].
ELECTRONICS LETTERS,
1981,
17
(23)
: 868
-
870
←
1
2
3
→
共 22 条
[11]
SELECTIVE ETCHING OF GALLIUM ARSENIDE CRYSTALS IN H2SO4-H2O2-H2O SYSTEM
LIDA, S
论文数:
0
引用数:
0
h-index:
0
LIDA, S
[J].
JOURNAL OF THE ELECTROCHEMICAL SOCIETY,
1971,
118
(05)
: 768
-
&
[12]
INGAASP-INP BURIED CRESCENT LASER EMITTING AT 1-3 MU-M WITH VERY LOW THRESHOLD CURRENT
MUROTANI, T
论文数:
0
引用数:
0
h-index:
0
MUROTANI, T
OOMURA, E
论文数:
0
引用数:
0
h-index:
0
OOMURA, E
HIGUCHI, H
论文数:
0
引用数:
0
h-index:
0
HIGUCHI, H
NAMIZAKI, H
论文数:
0
引用数:
0
h-index:
0
NAMIZAKI, H
SUSAKI, W
论文数:
0
引用数:
0
h-index:
0
SUSAKI, W
[J].
ELECTRONICS LETTERS,
1980,
16
(14)
: 566
-
568
[13]
VAPOR-PHASE GROWTH OF (INDIUM,GA)(ARSENIC,P) QUATERNARY ALLOYS
OLSEN, GH
论文数:
0
引用数:
0
h-index:
0
OLSEN, GH
ZAMEROWSKI, TJ
论文数:
0
引用数:
0
h-index:
0
ZAMEROWSKI, TJ
[J].
IEEE JOURNAL OF QUANTUM ELECTRONICS,
1981,
17
(02)
: 128
-
138
[14]
PREFERENTIAL ETCHING OF GAAS THROUGH PHOTORESIST MASKS
OTSUBO, M
论文数:
0
引用数:
0
h-index:
0
机构:
MITSUBISHI ELECT CORP, CENT RES LAB, ITAMI, HYOGO, JAPAN
MITSUBISHI ELECT CORP, CENT RES LAB, ITAMI, HYOGO, JAPAN
OTSUBO, M
ODA, T
论文数:
0
引用数:
0
h-index:
0
机构:
MITSUBISHI ELECT CORP, CENT RES LAB, ITAMI, HYOGO, JAPAN
MITSUBISHI ELECT CORP, CENT RES LAB, ITAMI, HYOGO, JAPAN
ODA, T
KUMABE, H
论文数:
0
引用数:
0
h-index:
0
机构:
MITSUBISHI ELECT CORP, CENT RES LAB, ITAMI, HYOGO, JAPAN
MITSUBISHI ELECT CORP, CENT RES LAB, ITAMI, HYOGO, JAPAN
KUMABE, H
MIKI, H
论文数:
0
引用数:
0
h-index:
0
机构:
MITSUBISHI ELECT CORP, CENT RES LAB, ITAMI, HYOGO, JAPAN
MITSUBISHI ELECT CORP, CENT RES LAB, ITAMI, HYOGO, JAPAN
MIKI, H
[J].
JOURNAL OF THE ELECTROCHEMICAL SOCIETY,
1976,
123
(05)
: 676
-
680
[15]
MATERIAL-SELECTIVE CHEMICAL ETCHING IN THE SYSTEM INGAASP-INP
PHATAK, SB
论文数:
0
引用数:
0
h-index:
0
机构:
Research Triangle Institute, North Carolina 27709, Research Triangle Park
PHATAK, SB
KELNER, G
论文数:
0
引用数:
0
h-index:
0
机构:
Research Triangle Institute, North Carolina 27709, Research Triangle Park
KELNER, G
[J].
JOURNAL OF THE ELECTROCHEMICAL SOCIETY,
1979,
126
(02)
: 287
-
292
[16]
ENHANCE GAAS ETCH RATES NEAR EDGES OF A PROTECTIVE MASK
SHAW, DW
论文数:
0
引用数:
0
h-index:
0
SHAW, DW
[J].
JOURNAL OF THE ELECTROCHEMICAL SOCIETY,
1966,
113
(09)
: 958
-
&
[17]
FUNDAMENTAL TRANSVERSE AND LONGITUDINAL MODE OSCILLATION IN TERRACED SUBSTRATE GAAS-(GAAL)AS LASERS
SUGINO, T
论文数:
0
引用数:
0
h-index:
0
机构:
Research Laboratory, Matsushita Electronics Corporation, Takatsuki, Osaka
SUGINO, T
ITOH, K
论文数:
0
引用数:
0
h-index:
0
机构:
Research Laboratory, Matsushita Electronics Corporation, Takatsuki, Osaka
ITOH, K
WADA, M
论文数:
0
引用数:
0
h-index:
0
机构:
Research Laboratory, Matsushita Electronics Corporation, Takatsuki, Osaka
WADA, M
SHIMIZU, H
论文数:
0
引用数:
0
h-index:
0
机构:
Research Laboratory, Matsushita Electronics Corporation, Takatsuki, Osaka
SHIMIZU, H
TERAMOTO, I
论文数:
0
引用数:
0
h-index:
0
机构:
Research Laboratory, Matsushita Electronics Corporation, Takatsuki, Osaka
TERAMOTO, I
[J].
IEEE JOURNAL OF QUANTUM ELECTRONICS,
1979,
15
(08)
: 714
-
718
[18]
PREFERENTIAL ETCHING AND ETCHED PROFILE OF GAAS
TARUI, Y
论文数:
0
引用数:
0
h-index:
0
TARUI, Y
KOMIYA, Y
论文数:
0
引用数:
0
h-index:
0
KOMIYA, Y
HARADA, Y
论文数:
0
引用数:
0
h-index:
0
HARADA, Y
[J].
JOURNAL OF THE ELECTROCHEMICAL SOCIETY,
1971,
118
(01)
: 118
-
&
[19]
CHEMICAL ETCHING OF [111] AND [100] SURFACES OF INP
TUCK, B
论文数:
0
引用数:
0
h-index:
0
机构:
UNIV NOTTINGHAM,DEPT ELECT & ELECT ENGN,NOTTINGHAM,ENGLAND
UNIV NOTTINGHAM,DEPT ELECT & ELECT ENGN,NOTTINGHAM,ENGLAND
TUCK, B
BAKER, AJ
论文数:
0
引用数:
0
h-index:
0
机构:
UNIV NOTTINGHAM,DEPT ELECT & ELECT ENGN,NOTTINGHAM,ENGLAND
UNIV NOTTINGHAM,DEPT ELECT & ELECT ENGN,NOTTINGHAM,ENGLAND
BAKER, AJ
[J].
JOURNAL OF MATERIALS SCIENCE,
1973,
8
(11)
: 1559
-
1566
[20]
PROPERTIES OF INVERTED RIB-WAVEGUIDE LASERS OPERATING AT 1.3 MU-M WAVELENGTH
TURLEY, SEH
论文数:
0
引用数:
0
h-index:
0
TURLEY, SEH
HENSHALL, GD
论文数:
0
引用数:
0
h-index:
0
HENSHALL, GD
GREENE, PD
论文数:
0
引用数:
0
h-index:
0
GREENE, PD
KNIGHT, VP
论文数:
0
引用数:
0
h-index:
0
KNIGHT, VP
MOULE, DM
论文数:
0
引用数:
0
h-index:
0
MOULE, DM
WHEELER, SA
论文数:
0
引用数:
0
h-index:
0
WHEELER, SA
[J].
ELECTRONICS LETTERS,
1981,
17
(23)
: 868
-
870
←
1
2
3
→