CARIATIONS OF THE NUCLEATED PRODUCTS IN ULTRATHIN FILMS OF TI-CO ON SI SUBSTRATES WITH PROCESSING CHANGES

被引：19

作者：

YANG, HY

BENE, RW

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1986年 / 59卷 / 05期

关键词：

D O I：

10.1063/1.336459

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1525 / 1535

页数：11

共 58 条

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