AUGER-ELECTRON SPECTROSCOPY ANALYSIS OF THE CONTACT REACTION OF PT-SI CODEPOSITED FILMS AND SILICON

被引：5

作者：

EIZENBERG, M ^{[1
]}

BRENER, R ^{[1
]}

机构：

[1] TECHNION ISRAEL INST TECHNOL,INST SOLID STATE,IL-32000 HAIFA,ISRAEL

来源：

THIN SOLID FILMS | 1982年 / 88卷 / 01期

关键词：

D O I：

10.1016/0040-6090(82)90348-0

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：41 / 48

页数：8

共 13 条

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THIN SOLID FILMS, 1979, 64 (03) :371-382

[3] FORMATION OF SHALLOW SCHOTTKY CONTACTS TO SI USING PT-SI AND PD-SI ALLOY-FILMS [J].

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JOURNAL OF APPLIED PHYSICS, 1981, 52 (02) :861-868

[4] SHALLOW SILICIDE CONTACTS FORMED BY USING CODEPOSITED PT2SI AND PT1.2 SI FILMS [J].

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FOLL, H ;

TU, KN .

APPLIED PHYSICS LETTERS, 1980, 37 (06) :547-549

[5] EFFECT OF SUBSTRATE-TEMPERATURE ON THE FORMATION OF SHALLOW SILICIDE CONTACTS ON SI USING PD-W AND PT-W ALLOYS [J].

EIZENBERG, M ;

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TU, KN .

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[7] SHALLOW SILICIDE-TO-SILICON CONTACTS - THE CASE OF AMORPHOUS-PD80SI20-TO-SILICON [J].

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TU, KN .

APPLIED PHYSICS LETTERS, 1980, 37 (02) :205-208

[8] SPUTTERING OF PTSI [J].

LIAU, ZL ;

MAYER, JW ;

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JOURNAL OF APPLIED PHYSICS, 1978, 49 (10) :5295-5305

[9] SILICIDE FORMATION WITH PD-V ALLOYS AND BILAYERS [J].

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TU, KN .

JOURNAL OF APPLIED PHYSICS, 1979, 50 (09) :5855-5859

[10] CONTACT REACTION BETWEEN SI AND PD-W ALLOY-FILMS [J].

OLOWOLAFE, JO ;

TU, KN ;

ANGILELLO, J .

JOURNAL OF APPLIED PHYSICS, 1979, 50 (10) :6316-6320

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