SELECTIVE STUDIES OF CHEMICAL VAPOR-DEPOSITED ALUMINUM NITRIDE SILICON NITRIDE MIXTURE FILMS

被引：25

作者：

ZIRINSKY, S

IRENE, EA

机构：

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1978年 / 125卷 / 02期

关键词：

D O I：

10.1149/1.2131433

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

页码：305 / 314

页数：10

共 39 条

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