INTERACTIONS OF THIN TI FILMS WITH SI, SIO2, SI3N4, AND SIOXNY UNDER RAPID THERMAL ANNEALING

被引：105

作者：

MORGAN, AE

BROADBENT, EK

RITZ, KN

SADANA, DK

BURROW, BJ

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1988年 / 64卷 / 01期

关键词：

D O I：

10.1063/1.341434

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：344 / 353

页数：10

共 32 条

[1] FORMATION OF TISI2 AND TIN DURING NITROGEN ANNEALING OF MAGNETRON SPUTTERED TI FILMS [J].

ADAMS, ED ;

AHN, KY ;

BRODSKY, SB .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1985, 3 (06) :2264-2267

[2] DEVELOPMENT OF THE SELF-ALIGNED TITANIUM SILICIDE PROCESS FOR VLSI APPLICATIONS [J].

ALPERIN, ME ;

HOLLAWAY, TC ;

HAKEN, RA ;

GOSMEYER, CD ;

KARNAUGH, RV ;

PARMANTIE, WD .

IEEE TRANSACTIONS ON ELECTRON DEVICES, 1985, 32 (02) :141-149

[3] THIN-FILM REACTION BETWEEN TI AND SI3N4 [J].

BARBOUR, JC ;

KUIPER, AET ;

WILLEMSEN, MFC ;

READER, AH .

APPLIED PHYSICS LETTERS, 1987, 50 (15) :953-955

[4] METASTABLE PHASE FORMATION IN TITANIUM-SILICON THIN-FILMS [J].

BEYERS, R ;

SINCLAIR, R .

JOURNAL OF APPLIED PHYSICS, 1985, 57 (12) :5240-5245

[5] PHASE-EQUILIBRIA IN THIN-FILM METALLIZATIONS [J].

BEYERS, R ;

SINCLAIR, R ;

THOMAS, ME .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1984, 2 (04) :781-784

[6] SELF-ALIGNED TI SILICIDE FORMED BY RAPID THERMAL ANNEALING [J].

BRAT, T ;

OSBURN, CM ;

FINSTAD, T ;

LIU, J ;

ELLINGTON, B .

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1986, 133 (07) :1451-1458

[7] TITANIUM SILICON AND SILICON DIOXIDE REACTIONS CONTROLLED BY LOW-TEMPERATURE RAPID THERMAL ANNEALING [J].

BRILLSON, LJ ;

SLADE, ML ;

RICHTER, HW ;

VANDERPLAS, H ;

FULKS, RT .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1986, 4 (03) :993-997

[8] A CORRELATION OF AUGER-ELECTRON SPECTROSCOPY, X-RAY PHOTOELECTRON-SPECTROSCOPY, AND RUTHERFORD BACKSCATTERING SPECTROMETRY MEASUREMENTS ON SPUTTER-DEPOSITED TITANIUM NITRIDE THIN-FILMS [J].

BURROW, BJ ;

MORGAN, AE ;

ELLWANGER, RC .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1986, 4 (06) :2463-2469

[9]

CHEN DC, 1984, IEDM, V84, P118

[10] STUDY OF TITANIUM-OXIDES USING AUGER LINE-SHAPES [J].

DAVIS, GD ;

NATAN, M ;

ANDERSON, KA .

APPLIED SURFACE SCIENCE, 1983, 15 (1-4) :321-333

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