SEED SHAPE DEPENDENCE OF SI SOLID-PHASE EPITAXY - PREFERENTIAL FACET GROWTH

被引：7

作者：

MURAKAMI, E

MONIWA, M

KUSUKAWA, K

MIYAO, M

WARABISAKO, T

WADA, Y

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1988年 / 63卷 / 10期

关键词：

D O I：

10.1063/1.340442

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：4975 / 4978

页数：4

共 18 条

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