POSITION DEPENDENCES IN PLANAR MAGNETRON SPUTTERING OF TIN FILMS

被引：5

作者：

NEIDHARDT, A

REINHOLD, U

SCHROETER, E

WUTTKE, W

机构：

[1] Ingenieurhochschule Zwickau, Germany

来源：

THIN SOLID FILMS | 1989年 / 173卷 / 01期

关键词：

41;

D O I：

10.1016/0040-6090(89)90543-9

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：109 / 127

页数：19

共 41 条

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