DISLOCATION REDUCTION IN HGCDTE EPILAYERS ON GAAS BY USING CDTE/CDZNTE STRAINED-LAYER SUPERLATTICES IN CDTE LAYERS

被引:18
作者
SUGIYAMA, I
HOBBS, A
SAITO, T
UEDA, O
SHINOHARA, K
TAKIGAWA, H
机构
[1] Fujitsu Laboratories Ltd., Atsugi, 243-01
关键词
D O I
10.1016/0022-0248(92)90737-4
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
The structure of CdTe/CdZnTe strained layer superlattices (SLSs) which block the threading dislocations has been studied. Since the residual strain in the heteroepitaxial CdTe offsets the SLS-induced strain, SLSs located near the interface of CdTe/GaAs should be constructed with large misfit force in place. The surface dislocation density of CdTe was found to be reduced by a factor of 2.5 by using the two SLSs, and by a factor of 4.3 for four SLSs. The etch pit density of a HgCdTe layer grown on this SLS buffer layer was reduced, a beneficial side effect of reducing the dislocations in the buffer layer. Thus, strained-layer superlattices effectively block dislocations if designed properly. The dislocation density can be further reduced by increasing the number of SLSs.
引用
收藏
页码:161 / 165
页数:5
相关论文
共 10 条
[1]   DISLOCATION DENSITY REDUCTION BY THERMAL ANNEALING OF HGCDTE EPILAYERS GROWN BY MOLECULAR-BEAM EPITAXY ON GAAS SUBSTRATES [J].
ARIAS, JM ;
ZANDIAN, M ;
SHIN, SH ;
MCLEVIGE, WV ;
PASKO, JG ;
DEWAMES, RE .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1991, 9 (03) :1646-1650
[2]   GALLIUM-ARSENIDE AND OTHER COMPOUND SEMICONDUCTORS ON SILICON [J].
FANG, SF ;
ADOMI, K ;
IYER, S ;
MORKOC, H ;
ZABEL, H ;
CHOI, C ;
OTSUKA, N .
JOURNAL OF APPLIED PHYSICS, 1990, 68 (07) :R31-R58
[3]   CDTE-GAAS(100) INTERFACE - MBE GROWTH, RHEED AND XPS CHARACTERIZATION [J].
FAURIE, JP ;
HSU, C ;
SIVANANTHAN, S ;
CHU, X .
SURFACE SCIENCE, 1986, 168 (1-3) :473-482
[4]   GROWTH AND PROPERTIES OF HG1-XCDXTE ON GAAS SUBSTRATES BY ORGANOMETALLIC VAPOR-PHASE EPITAXY [J].
GHANDHI, SK ;
BHAT, IB ;
TASKAR, NR .
JOURNAL OF APPLIED PHYSICS, 1986, 59 (06) :2253-2255
[5]  
MURAKAMI S, UNPUB
[6]   STRUCTURAL-PROPERTIES OF HG1-XZNX TE-CDTE STRAINED LAYER SUPERLATTICES AND THE REDUCTION OF THREADING DISLOCATIONS FROM A CDTE BUFFER LAYER [J].
PETRUZZELLO, J ;
OLEGO, D ;
CHU, X ;
FAURIE, JP .
JOURNAL OF APPLIED PHYSICS, 1989, 66 (07) :2980-2983
[7]   STRUCTURAL-PROPERTIES OF CDTE-ZNTE STRAINED-LAYER SUPERLATTICE GROWN ON GAAS BY HOT-WALL EPITAXY [J].
SUGIYAMA, I ;
HOBBS, A ;
UEDA, O ;
SHINOHARA, K ;
TAKIGAWA, H .
APPLIED PHYSICS LETTERS, 1991, 58 (24) :2755-2757
[8]   STRAIN RELAXATION OF CDTE(100) LAYERS GROWN BY HOT-WALL EPITAXY ON GAAS(100) SUBSTRATES [J].
TATSUOKA, H ;
KUWABARA, H ;
NAKANISHI, Y ;
FUJIYASU, H .
JOURNAL OF APPLIED PHYSICS, 1990, 67 (11) :6860-6864
[9]   ANALYSIS OF STRAINED-LAYER SUPERLATTICE EFFECTS ON DISLOCATION DENSITY REDUCTION IN GAAS ON SI SUBSTRATES [J].
YAMAGUCHI, M ;
NISHIOKA, T ;
SUGO, M .
APPLIED PHYSICS LETTERS, 1989, 54 (01) :24-26
[10]   DISLOCATIONS IN HGCDTE/CDTE AND HGCDTE/CDZNTE HETEROJUNCTIONS [J].
YOSHIKAWA, M ;
MARUYAMA, K ;
SAITO, T ;
MAEKAWA, T ;
TAKIGAWA, H .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 1987, 5 (05) :3052-3054