TRANSMISSION ELECTRON-MICROSCOPY STUDIES OF BROWN AND GOLDEN TITANIUM NITRIDE THIN-FILMS AS DIFFUSION-BARRIERS IN VERY LARGE-SCALE INTEGRATED-CIRCUITS

被引：71

作者：

KUMAR, N

MCGINN, JT

POURREZAEI, K

LEE, B

DOUGLAS, EC

机构：

[1] DREXEL UNIV,DEPT ELECT & COMP ENGN,PHILADELPHIA,PA 19104

[2] DAVID SARNOFF RES CTR,PRINCETON,NJ 08450

[3] RCA CORP,CTR MICROELECTR,SOMERVILLE,NJ 08876

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1988年 / 6卷 / 03期

关键词：

D O I：

10.1116/1.575335

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：1602 / 1608

页数：7

共 36 条

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