STRESS DEPENDENCE OF REACTIVELY SPUTTERED ALUMINUM NITRIDE THIN-FILMS ON SPUTTERING PARAMETERS

被引：75

作者：

HUFFMAN, GL

FAHNLINE, DE

MESSIER, R

PILIONE, LJ

机构：

[1] PENN STATE UNIV,DEPT PHYS,ALTOONA,PA 16603

[2] PENN STATE UNIV,DEPT ENGN SCI & MECH,UNIVERSITY PK,PA 16802

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1989年 / 7卷 / 03期

关键词：

D O I：

10.1116/1.575923

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：2252 / 2255

页数：4

共 13 条

[1] THE DEPENDENCE OF ALUMINUM NITRIDE FILM CRYSTALLOGRAPHY ON SPUTTERING PLASMA COMPOSITION
AITA, CR
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[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 1983, 1 (02): : 403 - 406
[2] STRESS MEASUREMENT IN SPUTTERED COPPER-FILMS ON FLEXIBLE POLYIMIDE SUBSTRATES
ENTENBERG, A
LINDBERG, V
FLETCHER, K
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HORWATH, RS
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1987, 5 (06): : 3373 - 3377
[3] REACTIVELY SPUTTERED AIN FILMS FOR GAAS ANNEALING CAPS
ESTE, G
SURRIDGE, R
WESTWOOD, WD
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1986, 4 (03): : 989 - 992
[4] STRESS-CONTROL IN REACTIVELY SPUTTERED AIN AND TIN FILMS
ESTE, G
WESTWOOD, WD
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1987, 5 (04): : 1892 - 1897
[5] SYNTHESIS OF COMPOUND THIN-FILMS BY DUAL ION-BEAM DEPOSITION .2. PROPERTIES OF ALUMINUM-NITROGEN FILMS
HENTZELL, HTG
HARPER, JME
CUOMO, JJ
[J]. JOURNAL OF APPLIED PHYSICS, 1985, 58 (01) : 556 - 563
[6] INTERNAL-STRESSES IN SPUTTERED CHROMIUM
HOFFMAN, DW
THORNTON, JA
[J]. THIN SOLID FILMS, 1977, 40 (JAN) : 355 - 363
[7] COMPRESSIVE STRESS TRANSITION IN AL, V, ZR, NB AND W METAL-FILMS SPUTTERED AT LOW WORKING PRESSURES
HOFFMAN, DW
THORNTON, JA
[J]. THIN SOLID FILMS, 1977, 45 (02) : 387 - 396
[8] INTERNAL-STRESSES IN CR, MO, TA, AND PT FILMS DEPOSITED BY SPUTTERING FROM A PLANAR MAGNETRON SOURCE
HOFFMAN, DW
THORNTON, JA
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1982, 20 (03): : 355 - 358
[9] ALN THIN-FILMS WITH CONTROLLED CRYSTALLOGRAPHIC ORIENTATIONS AND THEIR MICROSTRUCTURE
OHUCHI, FS
RUSSELL, PE
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1987, 5 (04): : 1630 - 1634
[10] SOMEKH RE, 1984, J VAC SCI TECHNOL A, V2, P1285, DOI 10.1116/1.572396

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