MEASUREMENT OF DIFFUSION-COEFFICIENT OF CF2 RADICAL IN DC PULSED CF4/H-2 DISCHARGE PLASMA

被引：5

作者：

ARAI, T

GOTO, M

TAKAYAMA, D

SHIMIZU, T

MURAKAMI, M

HORIKOSHI, K

FUJIOKA, H

机构：

[1] TOSHIBA LIGHTING & TECHNOL CORP,YOKOSUKA,KANAGAWA 237,JAPAN

[2] FUJITSU LABS LTD,NAKAHARA KU,KAWASAKI,KANAGAWA 211,JAPAN

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS | 1995年 / 34卷 / 10B期

关键词：

ETCHING PLASMA; CF2; RADICAL; DIFFUSION COEFFICIENT; CF4/H-2; PLASMA; LASER-INDUCED FLUORESCENCE;

D O I：

10.1143/JJAP.34.L1392

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Laser-induced fluorescence has been used to measure the CF2 radical ground-state densities after extinction of DC pulsed CF4/H-2 discharge plasma. From the measurement, the CF2 radical was shown to be removed mainly by a diffusion process. Its diffusion coefficients are found to be D=430 cm(2) . Torr . s(-1) in H-2 and D=65 cm(2) . Torr . s(-1) in CF4 at room temperature.

引用

收藏

页码：L1392 / L1394

页数：3

相关论文

共 13 条

[1] MEASUREMENTS OF DIFFUSION-COEFFICIENT OF CF2 RADICAL IN DC PULSED CF4 DISCHARGE PLASMA [J].

ARAI, T ;

GOTO, M ;

ASOH, Y ;

TAKAYAMA, D ;

SHIMIZU, T .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 1993, 32 (10A) :L1469-L1470

[2] MEASUREMENTS OF DIFFUSION-COEFFICIENT OF CF2 RADICAL IN DC PULSED CF4/O-2 DISCHARGE PLASMA [J].

ARAI, T ;

GOTO, M ;

TAKAYAMA, D ;

SHIMIZU, T ;

MURAKAMI, M .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1994, 33 (7B) :4170-4172

[3] DETERMINATION OF MASS-TRANSPORT COEFFICIENTS AND VIBRATIONAL-RELAXATION RATES OF SPECIES FORMED IN LASER PHOTOLYSIS EXPERIMENTS [J].

BIALKOWSKI, SE ;

KING, DS ;

STEPHENSON, JC .

JOURNAL OF CHEMICAL PHYSICS, 1980, 72 (02) :1156-1160

[4] SPATIALLY AND TEMPORALLY RESOLVED LASER-INDUCED FLUORESCENCE MEASUREMENTS OF CF2 AND CF RADICALS IN A CF4 RF PLASMA [J].

BOOTH, JP ;

HANCOCK, G ;

PERRY, ND ;

TOOGOOD, MJ .

JOURNAL OF APPLIED PHYSICS, 1989, 66 (11) :5251-5257

[5] LASER-INDUCED FLUORESCENCE DETECTION OF CF AND CF2 RADICALS IN A CF4/O2 PLASMA [J].

BOOTH, JP ;

HANCOCK, G ;

PERRY, ND .

APPLIED PHYSICS LETTERS, 1987, 50 (06) :318-319

[6] OPTICAL TECHNIQUES IN PLASMA DIAGNOSTICS [J].

GOTTSCHO, RA ;

MILLER, TA .

PURE AND APPLIED CHEMISTRY, 1984, 56 (02) :189-208

[7] FORMATION AND DECAY OF METASTABLE FLUORINE-ATOMS IN PULSED FLUOROCARBON OXYGEN DISCHARGES MONITORED BY LASER-INDUCED FLUORESCENCE [J].

HANSEN, SG ;

LUCKMAN, G ;

NIEMAN, GC ;

COLSON, SD .

APPLIED PHYSICS LETTERS, 1990, 56 (08) :719-721

[8] MEASUREMENTS OF F-STAR, CF, AND CF2 FORMATION AND DECAY IN PULSED FLUOROCARBON DISCHARGES [J].

HANSEN, SG ;

LUCKMAN, G ;

COLSON, SD .

APPLIED PHYSICS LETTERS, 1988, 53 (17) :1588-1590

[9] SPECTROSCOPY AND PHOTOPHYSICS OF THE CF2A 1B1-X 1A1 SYSTEM [J].

KING, DS ;

SCHENCK, PK ;

STEPHENSON, JC .

JOURNAL OF MOLECULAR SPECTROSCOPY, 1979, 78 (01) :1-15

[10] MEASUREMENTS OF THE CF RADICAL IN DC PULSED CF4/H2 DISCHARGE PLASMA USING INFRARED DIODE-LASER ABSORPTION-SPECTROSCOPY [J].

MAGANE, M ;

ITABASHI, N ;

NISHIWAKI, N ;

GOTO, T ;

YAMADA, C ;

HIROTA, E .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1990, 29 (05) :L829-L832