PLASMA DEPOSITION OF INORGANIC THIN-FILMS

被引：41

作者：

REINBERG, AR

机构：

来源：

ANNUAL REVIEW OF MATERIALS SCIENCE | 1979年 / 9卷

关键词：

D O I：

10.1146/annurev.ms.09.080179.002013

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：341 / 372

页数：32

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