EFFECT OF HIGH-ENERGY ION-BOMBARDMENT ON THE TRIBOLOGICAL PROPERTIES OF WS2 SPUTTERED FILMS

被引：6

作者：

HIRANO, M ^{[1
]}

MIYAKE, S ^{[1
]}

机构：

[1] NIPPON TELEGRAPH & TEL PUBL CORP, MUSASHINO ELECT COMMUN LAB, APPL ELECTR LABS, MUSASHINO, TOKYO 180, JAPAN

来源：

JOURNAL OF TRIBOLOGY-TRANSACTIONS OF THE ASME | 1988年 / 110卷 / 04期

关键词：

D O I：

10.1115/1.3261703

中图分类号：

TH [机械、仪表工业];

学科分类号：

0802 ;

摘要：

引用

页码：621 / 627

页数：7

共 17 条

[1] ION-BEAM-ENHANCED ADHESION OF AU FILMS ON SI AND SIO2 [J].

BERKOWITZ, AE ;

BENENSON, RE ;

FLEISCHER, RL ;

WIELUNSKI, L ;

LANFORD, WA .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1985, 7-8 (MAR) :877-880

[2] ENHANCEMENT OF SLIDING LIFE OF MOS2 FILMS DEPOSITED BY COMBINING SPUTTERING AND HIGH-ENERGY ION-IMPLANTATION [J].

CHEVALLIER, J ;

OLESEN, S ;

SORENSEN, G ;

GUPTA, B .

APPLIED PHYSICS LETTERS, 1986, 48 (13) :876-877

[3] BOMBARDMENT-DIFFUSED COATINGS AND ION-BEAM MIXING [J].

DEARNALEY, G .

RADIATION EFFECTS AND DEFECTS IN SOLIDS, 1982, 63 (1-4) :25-37

[4]

HARTLEY NEW, 1982, J MATER SCI, V8, P900

[5] SLIDING LIFE ENHANCEMENT OF A WS2 SPUTTERED FILM BY ION-BEAM MIXING [J].

HIRANO, M ;

MIYAKE, S .

APPLIED PHYSICS LETTERS, 1985, 47 (07) :683-685

[6]

HIRANO M, 1988, ASME, V110, P64

[7] ION-INDUCED PHASE FORMATION IN METAL METAL AND METAL SILICON THIN-FILM STRUCTURES [J].

HUNG, LS ;

MAYER, JW .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1985, 7-8 (MAR) :676-683

[8] ADHERENT TIN FILMS PRODUCED BY ION-BEAM ENHANCED DEPOSITION AT ROOM-TEMPERATURE [J].

KANT, RA ;

SARTWELL, BD ;

SINGER, IL ;

VARDIMAN, RG .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1985, 7-8 (MAR) :915-919

[9] PRODUCTION AND BEAM ANNEALING OF DAMAGE IN CARBON IMPLANTED SILICON .2. [J].

KOOL, WH ;

ROOSENDAAL, HE ;

WIGGERS, LW ;

SARIS, FW .

RADIATION EFFECTS AND DEFECTS IN SOLIDS, 1978, 36 (1-2) :41-48

[10] ION-BEAM MIXING OF METAL-SEMICONDUCTOR EUTECTIC SYSTEMS [J].

LAU, SS ;

TSAUR, BY ;

VONALLMEN, M ;

MAYER, JW ;

STRITZKER, B ;

WHITE, CW ;

APPLETON, B .

NUCLEAR INSTRUMENTS & METHODS, 1981, 182 (APR) :97-105

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