CONNECTION BETWEEN SI-N AND SI-H VIBRATIONAL PROPERTIES IN AMORPHOUS SINX-H FILMS

被引：70

作者：

HASEGAWA, S

ANBUTSU, H

KURATA, Y

机构：

来源：

PHILOSOPHICAL MAGAZINE B-PHYSICS OF CONDENSED MATTER STATISTICAL MECHANICS ELECTRONIC OPTICAL AND MAGNETIC PROPERTIES | 1989年 / 59卷 / 03期

关键词：

D O I：

10.1080/13642818908220184

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：365 / 375

页数：11

共 16 条

[1] INFRARED AND OPTICAL STUDY OF a-SiN ALLOYS.
Della Sala, D.
Coluzza, C.
Fortunato, G.
Evangelisti, F.
[J]. Journal of Non-Crystalline Solids, 1985, 77-78 Dec II : 933 - 936
[2] ELECTRON-SPIN-RESONANCE AND ELECTRICAL-PROPERTIES OF P-DOPED MICROCRYSTALLINE SI
HASEGAWA, S
NARIKAWA, S
KURATA, Y
[J]. PHILOSOPHICAL MAGAZINE B-PHYSICS OF CONDENSED MATTER STATISTICAL MECHANICS ELECTRONIC OPTICAL AND MAGNETIC PROPERTIES, 1983, 48 (05): : 431 - 447
[3] AMORPHOUS SIN-H DIELECTRICS WITH LOW-DENSITY OF DEFECTS
HASEGAWA, S
MATUURA, M
KURATA, Y
[J]. APPLIED PHYSICS LETTERS, 1986, 49 (19) : 1272 - 1274
[4] FORMATION AND BONDING STRUCTURE OF SILICON-NITRIDE BY 20-KEV N+ ION-IMPLANTATION
HASEGAWA, S
ZALM, PC
[J]. JOURNAL OF APPLIED PHYSICS, 1985, 58 (07) : 2539 - 2543
[5] BONDING AND ELECTRONIC-STRUCTURES OF AMORPHOUS SINX-H
HASEGAWA, S
TSUKAO, T
ZALM, PC
[J]. JOURNAL OF APPLIED PHYSICS, 1987, 61 (08) : 2916 - 2920
[6] BONDING PROPERTIES OF AMORPHOUS SINX-H FILMS WITH LOW-DENSITY OF SI-H BONDS
HASEGAWA, S
ANBUTU, H
KURATA, Y
[J]. JOURNAL OF NON-CRYSTALLINE SOLIDS, 1987, 97-8 : 1043 - 1046
[7] AMORPHOUS SINX-H FILMS WITH A LOW-DENSITY OF SI-H BONDS
HASEGAWA, S
MATUURA, M
ANBUTU, H
KURATA, Y
[J]. PHILOSOPHICAL MAGAZINE B-PHYSICS OF CONDENSED MATTER STATISTICAL MECHANICS ELECTRONIC OPTICAL AND MAGNETIC PROPERTIES, 1987, 56 (05): : 633 - 640
[8] ELECTRONIC-STRUCTURE OF HYDROGENATED AND UNHYDROGENATED AMORPHOUS SINX (0-LESS-THAN-X-LESS-THAN-1.6) - A PHOTOEMISSION-STUDY
KARCHER, R
LEY, L
JOHNSON, RL
[J]. PHYSICAL REVIEW B, 1984, 30 (04): : 1896 - 1910
[9] CHEMICAL EFFECTS ON THE FREQUENCIES OF SI-H VIBRATIONS IN AMORPHOUS SOLIDS
LUCOVSKY, G
[J]. SOLID STATE COMMUNICATIONS, 1979, 29 (08) : 571 - 576
[10] NITROGEN-BONDING ENVIRONMENTS IN GLOW-DISCHARGE DEPOSITED ALPHA-SI-H FILMS
LUCOVSKY, G
YANG, J
CHAO, SS
TYLER, JE
CZUBATYJ, W
[J]. PHYSICAL REVIEW B, 1983, 28 (06): : 3234 - 3240

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