CHARACTERIZATION OF SILICON-NITRIDE AND SILICON CARBONITRIDE LAYERS FROM 1,1,3,3,5,5-HEXAMETHYLCYCLOTRISILAZANE PLASMAS

被引：5

作者：

BROOKS, TA

HESS, DW

机构：

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1988年 / 135卷 / 12期

关键词：

D O I：

10.1149/1.2095507

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

页码：3086 / 3093

页数：8

共 56 条

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