INTERACTION OF HYDROGEN AND DEUTERIUM WITH COPPER IN GAAS

被引:16
作者
HOFMANN, G
MADOK, J
HAEGEL, NM
ROOS, G
JOHNSON, NM
HALLER, EE
机构
[1] UNIV CALIF LOS ANGELES,DEPT MAT SCI & ENGN,LOS ANGELES,CA 90024
[2] XEROX CORP,PALO ALTO RES CTR,PALO ALTO,CA 94304
[3] UNIV CALIF BERKELEY,DEPT MAT SCI & MINERAL ENGN,BERKELEY,CA 94720
关键词
D O I
10.1063/1.108020
中图分类号
O59 [应用物理学];
学科分类号
摘要
We have investigated hydrogen and deuterium passivation of two copper-related deep levels at E(V)+0.13 eV and E(V)+0.40 eV in GaAs with deep level transient spectroscopy (DLTS). The DLTS signals of the two copper-related acceptor levels disappear after exposing the samples to a remote hydrogen or deuterium plasma at 300-degrees-C for 1/2 h. Both copper-related levels can be reactivated by thermal annealing. The copper-related donor-accepter pair luminescence at 1.36 eV is correlated with the DLTS signal of the copper-related acceptor level at E(V)+0.13 eV.
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收藏
页码:2914 / 2916
页数:3
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