HIGH-RESOLUTION SECONDARY ION MASS-SPECTROMETRY DEPTH PROFILING USING CONTINUOUS SAMPLE ROTATION AND ITS APPLICATION TO SUPERLATTICE AND DELTA-DOPED SAMPLE ANALYSIS

被引：43

作者：

CIRLIN, EH

VAJO, JJ

HASENBERG, TC

HAUENSTEIN, RJ

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1990年 / 8卷 / 06期

关键词：

D O I：

10.1116/1.576447

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：4101 / 4103

页数：3

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