A CHARGED-PARTICLE ANALYZER FOR RADIO-FREQUENCY DISCHARGES

被引：19

作者：

SMITH, AM ^{[1
]}

BEILBY, BN ^{[1
]}

HORWITZ, CM ^{[1
]}

机构：

[1] UNIV NEW S WALES,DEPT ELECT ENGN & COMP SCI,KENSINGTON,NSW 2033,AUSTRALIA

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1989年 / 7卷 / 06期

关键词：

D O I：

10.1116/1.576145

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：3332 / 3336

页数：5

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